Reliability assessment of the Texas Instruments phase light modulator

The Digital Micromirror Device (DMD), developed by Texas Instruments (TI), has been in production for over 25 years. It is a Micro-optical-electro-mechanical system (MOEMS) that functions as a spatial light modulator (SLM) by directing millions of points of light into or out of the projection optics path. TI is now developing a new MOEMS device based on the same processes, equipment sets, and design knowledge as the DMD. This new device operates in a piston mode with each mirror moving up and down instead of rotating left and right as the DMD does. By operating in a piston mode, the mirrors can modulate the phase of light and function as a phase light modulator (PLM). This paper focuses on the reliability of the PLM device. TI has a strong foundation for MOEMS reliability resulting in the mature and reliable DMD. Early results from various life tests and environmental tests confirm that PLM reliability is comparable to DMD reliability. The paper will discuss reliability test results and related performance metrics.