聚二甲基硅氧烷
材料科学
电子皮肤
弹性体
压力传感器
基质(水族馆)
电介质
图层(电子)
电容感应
灵敏度(控制系统)
触觉传感器
复合材料
可伸缩电子设备
光电子学
薄膜
纳米技术
数码产品
电子工程
计算机科学
电气工程
物理
地质学
工程类
人工智能
海洋学
热力学
机器人
作者
Stefan C. B. Mannsfeld,Benjamin C. K. Tee,Randall M. Stoltenberg,Christopher V. H-H. Chen,Soumendra Barman,Beinn V. O. Muir,Anatoliy N. Sokolov,Colin Reese,Zhenan Bao
出处
期刊:Nature Materials
[Springer Nature]
日期:2010-09-12
卷期号:9 (10): 859-864
被引量:2860
摘要
The development of an electronic skin is critical to the realization of artificial intelligence that comes into direct contact with humans, and to biomedical applications such as prosthetic skin. To mimic the tactile sensing properties of natural skin, large arrays of pixel pressure sensors on a flexible and stretchable substrate are required. We demonstrate flexible, capacitive pressure sensors with unprecedented sensitivity and very short response times that can be inexpensively fabricated over large areas by microstructuring of thin films of the biocompatible elastomer polydimethylsiloxane. The pressure sensitivity of the microstructured films far surpassed that exhibited by unstructured elastomeric films of similar thickness, and is tunable by using different microstructures. The microstructured films were integrated into organic field-effect transistors as the dielectric layer, forming a new type of active sensor device with similarly excellent sensitivity and response times.
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