多物理
拓扑优化
执行机构
有限元法
微电子机械系统
拓扑(电路)
机械工程
灵敏度(控制系统)
工程设计过程
优化设计
自由度(物理和化学)
计算机科学
电子工程
工程类
控制工程
材料科学
结构工程
电气工程
物理
纳米技术
量子力学
机器学习
标识
DOI:10.1016/s0045-7825(01)00251-1
摘要
This is the first part of a two-paper description of the topology optimization method applied to the design of multiphysics actuators and electrothermomechanical systems in particular. The first paper is focussed on one-material structures, the second on two-material structures. The extensions of the topology optimization method in this first part include coupled and non-linear finite element analyses, constitutive modelling of elements with intermediate densities, adjoint sensitivity analyses and formulation of optimization problems with multiple constraints. The application in mind is the design of thermally and electrothermally driven micro actuators for use in microelectromechanical systems (MEMS). MEMS are microscopic mechanical systems coupled with electrical circuits. MEMS are fabricated using techniques known from the semi-conductor industry. Examples include design of thermal and electrothermal micro actuators with one, two and three degrees of freedom (d.o.f.). The differences between modelling and optimizing the actuators using linear and non-linear finite element analyses are discussed in detail. Ways for systematic interpretation and transfer of the topology optimized designs to the micromachining process are also discussed and finally, some test results prove the validity of the method.
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