材料科学
聚二甲基硅氧烷
微电子
纳米技术
光电子学
制作
晶体管
基质(水族馆)
跨导
激光烧蚀
激光器
光学
电气工程
电压
替代医学
病理
工程类
地质学
物理
海洋学
医学
作者
Bastien Marchiori,Roger Delattre,Stuart Hannah,S. Blayac,Marc Ramuz
标识
DOI:10.1038/s41598-018-26731-8
摘要
We describe a process allowing the patterning of fully stretchable organic electrochemical transistors (OECTs). The device consists of an active stretchable area connected with stretchable metallic interconnections. The current literature does not provide a complete, simple and accurate process using the standard thin film microelectronic techniques allowing the creation of such sensors. An innovative patterning process based on the combination of laser ablation and thermal release tape ensures the fabrication of highly stretchable metallic lines - encapsulated in polydimethylsiloxane - from conventional aluminium tape. State-of-the-art stretchability up to 70% combined with ultra-low mOhms resistance is demonstrated. We present a photolithographic process to pattern the organic active area onto stretchable substrate. Finally the formulation of poly(3,4-ethylenedioxythiophene):poly(styrenesulfonate) is tuned to achieve an OECT with a maximum stretchability of 38% while maintaining transconductance up to 0.35 mS and channel current as high as 0.2 mA.
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