亲爱的研友该休息了!由于当前在线用户较少,发布求助请尽量完整的填写文献信息,科研通机器人24小时在线,伴您度过漫漫科研夜!身体可是革命的本钱,早点休息,好梦!

Enhanced far ultra-violet optical properties of physical vapor deposited aluminum mirrors through fluorination

光电子学 材料科学 天体生物学 物理 复合材料
作者
Manuel A. Quijada,Javier G. Del Hoyo,Luis V. Rodriguez-de-Marcos,Zhilei Xu,Mateo F. Batkis,Devin M. Lewis,Tanner D. Rydalch,David D. Allred
标识
DOI:10.1117/12.3021592
摘要

Astronomical instrumentation for measurements in the Far Ultraviolet (FUV, 90−200 nm) have historically considered aluminum (Al) thin film mirrors due to this material high reflectance over this wavelength range. However, the native aluminum oxide layer that forms on Al upon exposure to the atmosphere is strongly absorbing in this wavelength range, requiring that the films be protected with a dielectric that inhibits oxidation. Typically, magnesium fluoride (MgF2) or lithium fluoride (LiF) coatings are used as protective layers, but each has shortcomings. For example, MgF2 has an absorption cutoff at 115 nm that reduces performance below this wavelength, which is a critical part of the FUV spectrum for observational astrophysics. The use of LiF as a protection for Al provides a lower absorption cutoff at 100 nm, but it is hygroscopic and thus susceptible to degradation in humid conditions. Our team at GSFC has developed a new reactive Physical Vapor Deposition (rPVD) process that consists of a fluorination process with XeF2 gas combined with our traditional PVD process. We have found that this new rPVD process produces Al+XeF2+LiF (XeLiF) and Al+XeF2+MgF2 (XeMgF2) mirror coatings with unprecedented reflectance. In addition, the rPVD process seems to produce much more environmentally stable coatings (when compared to the conventional process without the XeF2 fluorination). We report on IR/Vis/UV reflectance of XeLiF and XeMgF2 mirrors. The surface roughness as well as the FUV reflectance measured over a period of 8 months for a XeLiF sample with a relatively thin (≃ 30 nm) Al layer are also reported. We have also been investigating the compatibility of this rPVD coating process for potential efficiency enhancements of Si-based gratings. Since it is known that the XeF2 vapor is a strong Si etchant, we are investigating if the native SiO2 layer on Si is sufficient to protect the groove profile of E-beam-ruled Si gratings from degradation. Preliminary results indicate that the native SiO2 layer is an effective barrier against etching of Si by XeF2.
最长约 10秒,即可获得该文献文件

科研通智能强力驱动
Strongly Powered by AbleSci AI
更新
大幅提高文件上传限制,最高150M (2024-4-1)

科研通是完全免费的文献互助平台,具备全网最快的应助速度,最高的求助完成率。 对每一个文献求助,科研通都将尽心尽力,给求助人一个满意的交代。
实时播报
coco完成签到,获得积分10
10秒前
23秒前
yangguang2000发布了新的文献求助10
28秒前
Ice完成签到,获得积分10
39秒前
Alicia完成签到 ,获得积分10
47秒前
48秒前
桐桐应助yangguang2000采纳,获得10
50秒前
科研通AI2S应助科研通管家采纳,获得10
1分钟前
1分钟前
相识完成签到,获得积分20
1分钟前
CATH完成签到 ,获得积分10
1分钟前
1分钟前
云猫完成签到 ,获得积分10
1分钟前
zhanglh完成签到 ,获得积分10
1分钟前
1分钟前
科研通AI2S应助研友_yLpQrn采纳,获得10
1分钟前
1分钟前
2分钟前
李李原上草完成签到 ,获得积分10
2分钟前
yangguang2000发布了新的文献求助10
2分钟前
2分钟前
顾矜应助诚心的砖头采纳,获得10
2分钟前
积极的尔白完成签到 ,获得积分10
2分钟前
2分钟前
miyavi发布了新的文献求助30
2分钟前
小果子完成签到 ,获得积分10
3分钟前
3分钟前
bkagyin应助科研通管家采纳,获得10
3分钟前
科研通AI2S应助科研通管家采纳,获得10
3分钟前
NexusExplorer应助inRe采纳,获得10
3分钟前
yangguang2000发布了新的文献求助10
3分钟前
医生科学家完成签到 ,获得积分10
4分钟前
111完成签到 ,获得积分10
4分钟前
共享精神应助yangguang2000采纳,获得10
4分钟前
4分钟前
miyavi完成签到,获得积分20
4分钟前
巫马婷冉完成签到,获得积分10
4分钟前
巫马婷冉发布了新的文献求助10
4分钟前
4分钟前
Yx完成签到,获得积分10
4分钟前
高分求助中
The late Devonian Standard Conodont Zonation 2000
Nickel superalloy market size, share, growth, trends, and forecast 2023-2030 2000
The Lali Section: An Excellent Reference Section for Upper - Devonian in South China 1500
Very-high-order BVD Schemes Using β-variable THINC Method 890
Mantiden: Faszinierende Lauerjäger Faszinierende Lauerjäger 800
PraxisRatgeber: Mantiden: Faszinierende Lauerjäger 800
A new species of Coccus (Homoptera: Coccoidea) from Malawi 500
热门求助领域 (近24小时)
化学 医学 生物 材料科学 工程类 有机化学 生物化学 物理 内科学 纳米技术 计算机科学 化学工程 复合材料 基因 遗传学 催化作用 物理化学 免疫学 量子力学 细胞生物学
热门帖子
关注 科研通微信公众号,转发送积分 3256886
求助须知:如何正确求助?哪些是违规求助? 2899004
关于积分的说明 8303194
捐赠科研通 2568210
什么是DOI,文献DOI怎么找? 1394953
科研通“疑难数据库(出版商)”最低求助积分说明 652925
邀请新用户注册赠送积分活动 630649