Direct observation and elemental analysis of material nanoparticles in solution using scanning electron-assisted dielectric microscopy and EDS

High-resolution observation and elemental analysis of various particles in solution are important in the fields of materials, analytical chemistry, and industrial applications. Analysis of slurries of raw materials is essential for the development of highly functional materials. Recently, we have developed an SEM-based scanning electron assisted dielectric microscope (SE-ADM), which can directly observe biological samples and organic materials in aqueous solutions. Here, we have developed an SE-ADM system with the addition of energy-dispersive x-ray spectrometry that enables direct observation and elemental analysis of nanoparticles in solution. Using this system, we were able to directly observe and conduct elemental analysis of ceramic slurries and to clarify the dispersion state of alumina particles in solution, the distribution of binder, and the bonding state of silica and magnesium particles. Furthermore, our system can be applied to diverse liquid samples across a broad range of scientific and industrial fields, for example, nanotubes, organic specimens, batteries, and catalytic materials.