外延
氮化镓
微电子
材料科学
通量法
光电子学
镓
晶体生长
焊剂(冶金)
半导体
Crystal(编程语言)
单晶
纳米技术
结晶学
化学
冶金
计算机科学
程序设计语言
图层(电子)
作者
Ronglin Pan,Mingbin Zhou,Zhihua Xiong,Wenxiao Wu,Lei Ao,Qi Li,Gen Luo
标识
DOI:10.1007/s11664-022-09905-z
摘要
Gallium nitride (GaN) is an ideal semiconductor material for the development of microelectronic and optoelectronic devices. Homo-epitaxial growth on high-quality GaN single crystal substrates is the fundamental way to achieve high performance of GaN-based devices, and the Na-flux method is an effective way to grow large-size GaN single crystals by liquid phase epitaxy (LPE). In this paper, the growth of large-size GaN single crystals by the Na-flux method is systematically reviewed, and the main achievements are summarized. The development trend and main challenges of the Na-flux method for the growth of GaN single crystals are examined.
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