极紫外光刻
极端紫外线
等离子体
激光器
等离子体诊断
物理
辐射
光学
光电子学
材料科学
量子力学
摘要
The recent advances in the development and application of laser plasma sources of X-rays and extreme ultraviolet (EUV) based on a double-stream gas puff target are presented. The targets are formed by a system of two solenoid gas valves equipped with a double nozzle setup. Soft X-ray and EUV radiation is emitted from the plasma created by irradiating the gas puff target with a nanosecond laser pulse from the Nd:YAG laser. The results of recent work on the improvement of source parameters and their use in absorption spectroscopy, coherence tomography and plasma studies are presented.
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