阴极
等离子体
电压
规范化(社会学)
原子物理学
材料科学
电流(流体)
电力航天器推进
机械
计算物理学
推进
电气工程
物理
热力学
工程类
核物理学
社会学
人类学
作者
Marcel P. Georgin,Michael McDonald,J. W. Brooks
摘要
A sheath theory for RF plasma cathodes is developed based on an analogy with asymmetric double probe. It is shown that the family of curves produced is expected to collapse onto a single curve under a normalization of the discharge current to the ion saturation current and the discharge voltage to the electron temperature. This theory is combined for a global model to numerically study anticipated performance trends in an Ar discharge. These simulations are followed with experimental measurements of a cathode using Ar. The theory is shown to capture qualitative experimental trends, notably the collapse of the current-voltage curves onto a single curve under normalization. A quantitative comparison between theory and experiment is conducted and shows good agreement for key operating parameters such as discharge voltage and current.
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