材料科学
电容感应
电容
电容器
压力传感器
接近传感器
光电子学
电介质
电极
触觉传感器
介电常数
声学
电气工程
计算机科学
机器人
电压
人工智能
工程类
物理
机械工程
量子力学
作者
Yongsong Luo,Xiaoliang Chen,Xiangming Li,Hongmiao Tian,Liang Wang,Jinyou Shao
出处
期刊:Nano Research
[Springer Nature]
日期:2023-02-04
卷期号:16 (5): 7550-7558
被引量:24
标识
DOI:10.1007/s12274-022-5309-z
摘要
The integrated perception capable of detecting and monitoring varieties of activities is one of the ultimate purposes of wearable electronics and intelligent robots. Limited by the space occupation, it lacks practical feasibility to stack multiple types of single sensors on each other. Herein, a high-sensitivity dual-function capacitive sensor with proximity sensing and pressure sensing is proposed. The fringing electric field can be confined in the proximity-sensitive area by fibrous loop-patterned electrode, leading to more stolen charges when object approaching and thus a high proximity sensitivity. The high-permittivity doped structured dielectric layer reduces the compressive stiffness and enhances the rate of compression-caused increase in the equivalent relative permittivity of the dielectric layer, resulting in a larger increase in capacitance and thus a high pressure sensitivity. The electrodes and dielectric layer together compose the capacitor and act as the sensor without taking up additional space. The decoupling of proximity-sensing and pressure-sensing modes can be achieved by decrease or increase in capacitance. Combined with array distribution and sequential scanning, the sensors can be used for detection of motion trajectory, contour recognition, and pressure distribution.
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