材料科学
法布里-珀罗干涉仪
超声波传感器
振膜(声学)
薄脆饼
光学
光纤
干涉测量
局部放电
光纤传感器
硅
灵敏度(控制系统)
压力传感器
沟槽(工程)
光电子学
声学
纤维
波长
电压
振动
电子工程
复合材料
电气工程
物理
冶金
热力学
工程类
作者
Lina Zhang,Yi Huang,Xiling Niu,Liangjie Wang,Chengyong Hu,Chuanlu Deng,Weifeng Peng,Yuexiang Lu,Qun Li,Dong Yue,Qi Zhang,Xiaobei Zhang,Tingyun Wang
出处
期刊:Applied Optics
[The Optical Society]
日期:2023-08-28
卷期号:62 (25): 6809-6809
摘要
An extrinsic fiber optic Fabry–Perot interferometric (EFPI) ultrasonic sensor based on a grooved silicon diaphragm for partial discharge (PD) detection has been proposed. The size of the groove is determined by finite element simulation, which allows the resonant frequency of the sensor to meet the requirements of PD ultrasonic detection and improves the sensitivity of the sensor by 5.07 times compared with that based on a traditional circular diaphragm. The microelectro–mechanical system process is used to fabricate the diaphragm on a silicon-on-insulator wafer, and the prepared diaphragm has a grooved section with a diameter of 829.34 µm and a thickness of only 2.09 µm. At its resonant frequency of 61.5 kHz, the acoustic pressure sensitivity of the sensor is 172.42 mV/Pa. The ultrasonic signal detection capability of the sensor is verified in the PD experiment. Furthermore, the characteristics of the corona discharge are successfully manifested based on the ultrasonic waves detected by the EFPI sensor. It is demonstrated that the proposed sensor is suitable for PD detection due to its high sensitivity, simple production process, and good resistance to environmental interference.
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