Structure and properties of quasi-amorphous films prepared by ion beam techniques

Ion beam deposition techniques offer interesting possibilities for the preparation of metastable quasi-amorphous films owing to a high local activation and rapid quenching on an atomic scale. This is demonstrated in the context of new results obtained with the following materials: (1) i-carbon with diamond-like properties; (2) hard BN coatings;(3) hydrogenated dopable a-Si. The film-forming processes and the layer properties observed are interpreted by a first approximation model based on the concept of rapidly collapsing thermal spikes.