材料科学
纳米光刻
场效应晶体管
涂层
光电子学
磁滞
旋涂
晶体管
平版印刷术
电子束光刻
纳米技术
抵抗
图层(电子)
电压
制作
电气工程
凝聚态物理
医学
病理
工程类
替代医学
物理
作者
Eui-Hyoun Ryu,Miri Seo,Yugyeong Je,HyunJeong Jeong,Gyu‐Tae Kim,Sang Wook Lee
标识
DOI:10.1016/j.cap.2023.01.003
摘要
We investigated electrical properties f ReS2 field effect transistor (FET) by focusing on how the absorbent molecules on the surface of ReS2 channel could affect to its FET performances. A few layer ReS2 based FET devices were fabricated by nanofabrication processes including micro-contact transfer method and electron-beam lithography technique. The FET characteristics were measured under following conditions: 1) with pristine device, 2) at vacuum condition, 3) after baking FET with hot plate, and 4) after PMMA spin-coating on FET. The current value at output characteristics were increased and hysteresis at transfer curve reduced when FET was measured in vacuum state and after baking process. The improved FET performances such as higher current and mobility values after baking process could be maintained by encapsulating the ReS2 channel using PMMA spin-coating process. The effects of absorbents such as water and oxygen molecules on the ReS2 surface were suggested based on the experimental results. Our results showed that simple baking and spin-coating methods could improve the electrical characteristics and maintain a persistent performance of ReS2 FET.
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