变形镜
泽尼克多项式
执行机构
微电子机械系统
材料科学
光学
叠加原理
制作
压电
光圈(计算机存储器)
自适应光学
波前
计算机科学
光电子学
声学
物理
人工智能
医学
替代医学
病理
量子力学
复合材料
作者
Junning Zhang,Xinyue Zhang,Yan Wang,Tunan Lv,Hongbin Yu
出处
期刊:Optics Letters
[The Optical Society]
日期:2023-08-21
卷期号:48 (18): 4777-4777
被引量:5
摘要
An AlN-based piezoelectric micro-electromechanical system (MEMS) continuous membrane deformable mirror (DM) prototype is presented for the first time. Its effective aperture diameter is 5 mm and it is equipped with 25 independently controlled actuators. Owing to the advantages associated with the AlN piezoelectric thin-film technology, attractive characteristics including CMOS compatible fabrication, bidirectional linear and negligible hysteresis actuation, and excellent linear superposition control capability have been successfully demonstrated. Moreover, good optical aberration correction performance is also validated via the surface contour fitting experiment to the Zernike polynomials up to the first 14 orders despite the non-optimized device structure design, representing great application perspective.
科研通智能强力驱动
Strongly Powered by AbleSci AI