3D-Printed Multi-Axis Alignment Airgap Dielectric Layer for Flexible Capacitive Pressure Sensor

Flexible pressure sensors are increasingly recognized for their potential use in wearable electronic devices, attributed to their sensitivity and broad pressure response range. Introducing surface microstructures can notably enhance sensitivity; however, the pressure response range remains constrained by the limited volume of the compressible structure. To overcome this limitation, this study implements an aligned airgap structure fabricated using 3D printing technology. This structure, designed with a precisely aligned triaxial airgap configuration, offers high deformability under pressure, substantially broadening the pressure response range and improving sensitivity. This study analyzes the key structural parameters-the number of axes and pore size-that influence the compressibility and stability of the dielectric material. The results indicate that the capacitive pressure sensor with an aligned airgap structure, manufactured via 3D printing, exhibits a wide operating pressure range (50 Pa to 500 kPa), rapid response time (100 ms), wide limit of detection (50 Pa), and approximately 21 times enhancement in sensitivity (~0.019 kPa