埃
摄影术
电子显微镜
分辨率(逻辑)
光学
图像分辨率
扫描透射电子显微镜
显微镜
显微镜
材料科学
物理
化学
衍射
结晶学
计算机科学
人工智能
作者
Kayla X. Nguyen,Yi Jiang,Chia‐Hao Lee,Priti Kharel,Yue Zhang,Arend M. van der Zande,Pinshane Y. Huang
出处
期刊:Science
[American Association for the Advancement of Science (AAAS)]
日期:2024-02-22
卷期号:383 (6685): 865-870
被引量:11
标识
DOI:10.1126/science.adl2029
摘要
Subangstrom resolution has long been limited to aberration-corrected electron microscopy, where it is a powerful tool for understanding the atomic structure and properties of matter. Here, we demonstrate electron ptychography in an uncorrected scanning transmission electron microscope (STEM) with deep subangstrom spatial resolution down to 0.44 angstroms, exceeding the conventional resolution of aberration-corrected tools and rivaling their highest ptychographic resolutions. Our approach, which we demonstrate on twisted two-dimensional materials in a widely available commercial microscope, far surpasses prior ptychographic resolutions (1 to 5 angstroms) of uncorrected STEMs. We further show how geometric aberrations can create optimized, structured beams for dose-efficient electron ptychography. Our results demonstrate that expensive aberration correctors are no longer required for deep subangstrom resolution.
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