材料科学
微观结构
X射线光电子能谱
溅射沉积
腐蚀
无定形固体
高分辨率透射电子显微镜
复合数
透射电子显微镜
压痕硬度
拉曼光谱
冶金
复合材料
分析化学(期刊)
溅射
薄膜
化学工程
结晶学
纳米技术
光学
工程类
物理
色谱法
化学
作者
Shunuo Bian,Lihua Yu,Pei Jia,Junhua Xu
标识
DOI:10.1016/j.ijrmhm.2022.105885
摘要
In this research, NbCN-Cu films with different Cu contents were prepared by multi-target confocal RF magnetron sputtering. X-ray diffraction (XRD), high-resolution transmission electron microscopy (HRTEM), X-ray Photoelectron Spectroscopy (XPS), Raman spectrometry, Energy Disperse Spectroscopy (EDS), nano-indentation, and electrochemical workstation were used to characterize and analyze the microstructure, mechanical properties and corrosion resistance of the films. The results show that the NbCN-Cu composite films consist of crystalline face-centered cubic(fcc) Cu, face-centered cubic(fcc) NbCN, hexagonal close-packed(hcp) NbCN, and amorphous graphite and CNx phases. When Cu content was 2.6 at.%, a coherent interface was detected between fcc-Cu and fcc-NbCN, hcp-NbCN, and dislocations were detected at the coherent interface when Cu content increased to 9.5 at.%. With the increase of Cu content, the microhardness of the film first increased and then decreased. NbCN-Cu composite film with Cu content of 2.6 at.% had the highest hardness of 32.8 GPa and remarkable corrosion resistance. The self-corrosion potential of the film was 0.18 V and self-corrosion current density was 2.29 × 10−6 A/cm2.
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