Development of parallel piezoelectric six-axis force/torque sensor

According to the technological bottleneck of elastic style six-axis force sensors,a novel parallel piezoelectric six-axis force/torque sensor was proposed.Firstly,the structure and operating principle of the sensor were presented,and two different arrangements of the eight group piezoelectric quartz crystals for the sensor were put forward.Then their mathematic models were derived,the finite element model of sensor was established,and the output charge sensitivity,coupling interference and the natural frequency of the sensor were analyzed by ANSYS software.Finally,the static and dynamic characteristics of the sensor were calibrated.Research results indicate that the sensor has simple and rational structure,correct mathematic model and simulation way.Moreover,its natural frequency is more than 25 kHz and coupling interference is less than 3% after using the decoupling matrix.These results satisfy the requirements of sensor design targets.