灵敏度(控制系统)
电容器
电感器
压力传感器
材料科学
LC电路
电容电路
光电子学
电气工程
巴(单位)
温度测量
无线
对偶(语法数字)
电子工程
电压
计算机科学
工程类
物理
电信
机械工程
文学类
艺术
气象学
量子力学
作者
Qiulin Tan,Tao Luo,Tanyong Wei,Jun Liu,Liwei Lin,Jijun Xiong
出处
期刊:Journal of microelectromechanical systems
[Institute of Electrical and Electronics Engineers]
日期:2017-01-17
卷期号:26 (2): 351-356
被引量:67
标识
DOI:10.1109/jmems.2016.2642580
摘要
This paper presents a passive wireless sensor for simultaneously and remotely measuring pressure and temperature under harsh environments. The sensor consists of a dual LC (inductor and capacitor) resonant circuit, one without a cavity and the other with a cavity capacitor for temperature and pressure sensing, respectively. The low-temperature co-fired ceramic technology is used to fabricate the sensor, making it suitable for high-temperature harsh environment operations. Experimental results show the prototype sensor has temperature sensitivity of 8.15 kHz/°C and pressure sensitivity of 1.96 MHz/Bar up to 400°C.
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