偏振器
像素
图像传感器
极化(电化学)
材料科学
光学
薄脆饼
消光比
气隙(管道)
光电子学
物理
双折射
波长
物理化学
复合材料
化学
作者
Tomohiro Yamazaki,Yasushi Maruyama,Yusuke Uesaka,Nakamura Motoaki,Yoshihisa Matoba,Takashi Terada,Komori Kenta,Yoshiyuki Ohba,Shin’ichi Arakawa,Yasutaka Hirasawa,Yuhi Kondo,Jun Murayama,Kentaro Akiyama,Yusuke Oike,Shuzo Sato,Takayuki Ezaki
标识
DOI:10.1109/iedm.2016.7838378
摘要
Polarization information is useful in highly functional imaging. This paper presents a four-directional pixel-wise polarization CMOS image sensor using an air-gap wire grid on 2.5-μm back-illuminated pixels. The fabricated air-gap wire grid polarizer achieved a transmittance of 63.3 % and an extinction ratio of 85 at 550 nm, outperforming conventional polarization sensors. The pixel-wise polarizers fabricated with the wafer process on back-illuminated image sensors exhibit good oblique-incidence characteristics, even with small polarization pixels of 2.5 μm. The proposed image sensor realizes mega-pixel various fusion-imaging applications, such as surface reflection reduction, highly accurate depth mapping, and condition-robust surveillance.
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