Novel Silicon-based Attenuator Chip

The fast development of the wireless technology has enabled phased-array technology and 5G communication technology a hot research point. As an indispensable module in the wireless technology, the radio frequency front-end chip influences the performance of the wireless system. Silicon-based integrated circuit has been attracting increasing attention in the micrometer and millimeter wave filed, because it has many advantages, such as low cost, low power consumption and high integration. In order to achieve amplitude control with large range and high precision, three silicon-based attenuator chips with different structures are proposed in this paper, and their simulation design and processing test are carried out. The test results are basically consistent with the simulation, and the performance of devices is excellent. Firstly, they can work in ultra-wide microwave frequency range $(\mathrm{D}\mathrm{C}\sim 50\mathrm{G}\mathrm{H}\mathrm{z})$. Secondly, the proposed attenuators feature very small size $(0.7\mathrm{m}\mathrm{m}^{\star}0.7\mathrm{m}\mathrm{m}^{\star}0.1\mathrm{m}\mathrm{m})$, which is conducive to the miniaturization of integrated circuits. These attenuators can be used in various circuits, whether in communication technology, radar phased control technology, radio frequency technology, or other electronic circuits, as long as there is an amplifier circuit, almost all of them can not do without attenuator.