Modeling and Control Analysis of a 3-PUPU Dual Compliant Parallel Manipulator for Micro Positioning and Active Vibration Isolation

In recent years, many applications in precision engineering require a careful isolation of the instrument from the vibration sources by adopting active vibration isolation system to achieve a very low remaining vibration level, especially for the very low frequency under 10 Hz vibration signals. This paper presents a 3-PUPU dual parallel manipulator for both rough positioning and active vibration isolation in a wide-range workspace based on our previous research experiences in the systematical modeling and study of parallel robots. The manipulator is designed as a kind of macro/micro hybrid robot. Both the kinematics model for macro motion and dynamics model for micro motion are established by using stiffness equation and the Kane’s method, respectively. An active vibration control strategy is described by using the H2 method. Moreover, numerical simulations on the inverse solution for macro motion, workspace, and the active vibration control effects are performed at the end of this paper.