光学
材料科学
透射率
传递矩阵法(光学)
菲涅耳方程
表面光洁度
薄膜
矩阵法
基质(化学分析)
传递矩阵
图层(电子)
表面粗糙度
光电子学
折射率
物理
复合材料
纳米技术
计算机科学
计算机视觉
作者
C.L. Mitsas,D. Siapkas
出处
期刊:Applied optics
[The Optical Society]
日期:1995-04-01
卷期号:34 (10): 1678-1678
被引量:177
摘要
A generalized matrix method is presented for calculating the optical reflectance and transmittance of an arbitrary thin-solid-film multilayer structure on very thick substrates with rough surfaces and interfaces. We show that the effect of roughness and the influence of incoherently reflected light on the back side of a thick layer can be accounted for with a more general transfer matrix that enables the inclusion of modified complex Fresnel coefficients. Coherent, partially coherent, and incoherent multiply reflected light inside the multilayer structure is treated in the same way. We demonstrate the method by applying it to simulated and experimental reflectance spectra of thin epitaxial Si overlayers on very thick SiO(2) substrates and on a separation by ion implantation of oxygen structure with a SiO(2) buried layer exhibiting substantial roughness on both of its interfaces (Si/SiO(2) and SiO(2)/Si).
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