Dual-stream gas targets for a point source of vacuum and extreme ultraviolet radiation supported by focused electromagnetic radiation

The article presents the results of visualization of two-stream gas targets for a point source of vacuum ultraviolet and extreme ultraviolet radiation. Measurements of the gas concentration spatial distribution were carried out using a Michelson interferometer. It is shown that adding a light gas to the peripheral channel significantly moves the region of breakdown concentration of injected gas through the central channel away from the nozzle, while maintaining the overall gas flow and background pressure.