作者
Mengya Song,Qiongzhen Liu,Xu Xiao,Bo Wang,Ying Lü,Liyan Yang,Xue Liu,Yuedan Wang,Mufang Li,Dong Wang
摘要
Abstract Currently, flexible tactile sensors integrating proximity‐pressure sensing encounter challenges in efficient multisignal acquisition, accurate recognition, cost control, and scalability. Herein, a fabric‐based multimodal flexible capacitive sensor (MFCS), combining an integrated fabric electrode design with a magnetic tilted micropillars (MTM) array microstructure, is developed. This innovative design significantly enhances the sensor's fringing effect, magnetic responsiveness, and dielectric layer's deformation ability, enabling precise perception of pressure, proximity, and magnetic field changes. The MFCS demonstrates high sensitivity and rapid response characteristics, achieving a sensitivity of 0.146 kPa⁻¹ under 0–2 kPa pressure with response/recovery times of ≈12/24 ms. Moreover, it detects hand proximity within a 20 cm range, with a sensitivity of −0.039 cm⁻¹ in the 0–2 cm range, and a magnetic field detection limit of 10 mT, showing a sensitivity of −1.72 T⁻¹ in the 60–230 mT range. The sensor operates effectively in both capacitance and resonant frequency modes, distinguishing different signals, thus offering new possibilities for smart wearable devices and interactive systems. Overall, the MFCS features multimodal sensing, a fully fabric structure, cost‐effectiveness, and ease of fabrication, making it promising for human–computer interaction, artificial intelligence, and health monitoring.