Deep neural network-based reduced-order modeling of ion–surface interactions combined with molecular dynamics simulation

自编码 离子 分子动力学 溅射 材料科学 等离子体刻蚀 特征(语言学) 曲面(拓扑) 人工神经网络 计算物理学 计算机科学 蚀刻(微加工) 纳米技术 人工智能 化学 物理 数学 几何学 计算化学 图层(电子) 有机化学 哲学 语言学 薄膜
作者
Byungjo Kim,Jinkyu Bae,Hyunhak Jeong,Seung Ho Hahn,Suyoung Yoo,Sang Ki Nam
出处
期刊:Journal of Physics D [IOP Publishing]
卷期号:56 (38): 384005-384005 被引量:3
标识
DOI:10.1088/1361-6463/acdd7f
摘要

Abstract With the advent of complex and sophisticated architectures in semiconductor device manufacturing, atomic-resolution accuracy and precision are commonly required for industrial plasma processing. This demands a comprehensive understanding of the plasma–material interactions—particularly for forming fine high-aspect ratio (HAR) feature patterns with sufficiently high yield in wafer-level processes. In particular, because the shape distortion in HAR pattern etching is attributed to the deviation of the energetic ion trajectory, the detailed ion–surface interactions need to be thoroughly investigated. In this study, molecular dynamics (MD) simulations were utilized to obtain a fundamental understanding of the collisional nature of accelerated Ar ions on the fluorinated Si surface that may appear on the sidewall of the HAR etched hole. High-fidelity data for ion–surface interaction features representing the energy and angle distributions (EADs) of sputtered atoms for varying degrees of surface F coverage and ion incident angles were obtained via extensive MD simulations. A deep learning-based reduced-order modeling (DL-ROM) framework was developed for efficiently predicting the characteristics of the ion–surface interactions. In the ROM framework, a conditional variational autoencoder (AE) was implemented to obtain regularized latent representations of the distributional data with the condition of the governing factors of the physical system. The proposed ROM framework accurately reproduced the MD simulation results and significantly outperformed various DL-ROMs, such as AE, sparse AE, contractive AE, denoising AE, and variational AE. From the inferred features of the sputtering yield and EADs of sputtered/scattered species, significant insights can be obtained regarding the ion interactions with the fluorinated surface. As the ion incident angle deviated from the glancing-angle range (incident angle >80°), diffuse reflection behavior was observed, which can substantially affect the ion transport in the HAR patterns. Moreover, it was hypothesized that a shift in sputtering characteristics occurs as the surface F coverage varies, based on the inferred EADs. This conjecture was confirmed through detailed MD simulations that demonstrated the fundamental relationship between surface atomic conformations and their sputtering behavior. Combined with additional atomistic-scale investigations, this framework can provide an efficient way to reveal various fundamental plasma–material interactions which are highly demanded for the future development of semiconductor device manufacturing.
最长约 10秒,即可获得该文献文件

科研通智能强力驱动
Strongly Powered by AbleSci AI
更新
大幅提高文件上传限制,最高150M (2024-4-1)

科研通是完全免费的文献互助平台,具备全网最快的应助速度,最高的求助完成率。 对每一个文献求助,科研通都将尽心尽力,给求助人一个满意的交代。
实时播报
zoe完成签到 ,获得积分10
1秒前
灰灰12138完成签到,获得积分10
1秒前
胖豆完成签到,获得积分10
2秒前
完美世界应助深情数据线采纳,获得10
2秒前
星辰大海应助H-kevin.采纳,获得10
2秒前
呜啦啦完成签到,获得积分10
2秒前
eisa完成签到,获得积分10
3秒前
今后应助nicole采纳,获得10
3秒前
夏雨的天完成签到 ,获得积分10
3秒前
你才是小哭包完成签到 ,获得积分10
4秒前
nv42r8完成签到,获得积分10
4秒前
5秒前
RRR完成签到,获得积分10
5秒前
6秒前
7秒前
allah完成签到,获得积分10
8秒前
Reader01完成签到 ,获得积分10
8秒前
9秒前
带着猫去旅行完成签到,获得积分20
9秒前
9秒前
orixero应助loveananya采纳,获得30
9秒前
金虎完成签到,获得积分10
10秒前
mumu完成签到,获得积分10
11秒前
炸毛可乐完成签到,获得积分10
11秒前
11秒前
啊TiP完成签到,获得积分10
11秒前
冯冯完成签到 ,获得积分10
12秒前
12秒前
jun关闭了jun文献求助
12秒前
蝉鸣完成签到,获得积分10
12秒前
12秒前
喂喂喂完成签到,获得积分10
13秒前
cheng完成签到 ,获得积分10
14秒前
木雨洛完成签到,获得积分10
14秒前
充电宝应助hopen采纳,获得10
14秒前
vhjino完成签到,获得积分10
14秒前
~~完成签到,获得积分10
14秒前
12完成签到,获得积分10
14秒前
明芷蝶完成签到,获得积分10
15秒前
作文27分完成签到,获得积分10
16秒前
高分求助中
Sustainability in Tides Chemistry 2000
Microlepidoptera Palaearctica, Volumes 1 and 3 - 13 (12-Volume Set) [German] 1122
Дружба 友好报 (1957-1958) 1000
The Data Economy: Tools and Applications 1000
Mantiden - Faszinierende Lauerjäger – Buch gebraucht kaufen 700
PraxisRatgeber Mantiden., faszinierende Lauerjäger. – Buch gebraucht kaufe 700
A Dissection Guide & Atlas to the Rabbit 600
热门求助领域 (近24小时)
化学 医学 生物 材料科学 工程类 有机化学 生物化学 物理 内科学 纳米技术 计算机科学 化学工程 复合材料 基因 遗传学 催化作用 物理化学 免疫学 量子力学 细胞生物学
热门帖子
关注 科研通微信公众号,转发送积分 3099945
求助须知:如何正确求助?哪些是违规求助? 2751385
关于积分的说明 7613674
捐赠科研通 2403417
什么是DOI,文献DOI怎么找? 1275270
科研通“疑难数据库(出版商)”最低求助积分说明 616322
版权声明 599053