亲爱的研友该休息了!由于当前在线用户较少,发布求助请尽量完整的填写文献信息,科研通机器人24小时在线,伴您度过漫漫科研夜!身体可是革命的本钱,早点休息,好梦!

Deep neural network-based reduced-order modeling of ion–surface interactions combined with molecular dynamics simulation

自编码 离子 分子动力学 溅射 材料科学 等离子体刻蚀 特征(语言学) 曲面(拓扑) 人工神经网络 计算物理学 计算机科学 蚀刻(微加工) 纳米技术 人工智能 化学 物理 数学 几何学 计算化学 图层(电子) 有机化学 哲学 语言学 薄膜
作者
Byungjo Kim,Jinkyu Bae,Hyunhak Jeong,Seung Ho Hahn,Suyoung Yoo,Sang Ki Nam
出处
期刊:Journal of Physics D [IOP Publishing]
卷期号:56 (38): 384005-384005 被引量:3
标识
DOI:10.1088/1361-6463/acdd7f
摘要

Abstract With the advent of complex and sophisticated architectures in semiconductor device manufacturing, atomic-resolution accuracy and precision are commonly required for industrial plasma processing. This demands a comprehensive understanding of the plasma–material interactions—particularly for forming fine high-aspect ratio (HAR) feature patterns with sufficiently high yield in wafer-level processes. In particular, because the shape distortion in HAR pattern etching is attributed to the deviation of the energetic ion trajectory, the detailed ion–surface interactions need to be thoroughly investigated. In this study, molecular dynamics (MD) simulations were utilized to obtain a fundamental understanding of the collisional nature of accelerated Ar ions on the fluorinated Si surface that may appear on the sidewall of the HAR etched hole. High-fidelity data for ion–surface interaction features representing the energy and angle distributions (EADs) of sputtered atoms for varying degrees of surface F coverage and ion incident angles were obtained via extensive MD simulations. A deep learning-based reduced-order modeling (DL-ROM) framework was developed for efficiently predicting the characteristics of the ion–surface interactions. In the ROM framework, a conditional variational autoencoder (AE) was implemented to obtain regularized latent representations of the distributional data with the condition of the governing factors of the physical system. The proposed ROM framework accurately reproduced the MD simulation results and significantly outperformed various DL-ROMs, such as AE, sparse AE, contractive AE, denoising AE, and variational AE. From the inferred features of the sputtering yield and EADs of sputtered/scattered species, significant insights can be obtained regarding the ion interactions with the fluorinated surface. As the ion incident angle deviated from the glancing-angle range (incident angle >80°), diffuse reflection behavior was observed, which can substantially affect the ion transport in the HAR patterns. Moreover, it was hypothesized that a shift in sputtering characteristics occurs as the surface F coverage varies, based on the inferred EADs. This conjecture was confirmed through detailed MD simulations that demonstrated the fundamental relationship between surface atomic conformations and their sputtering behavior. Combined with additional atomistic-scale investigations, this framework can provide an efficient way to reveal various fundamental plasma–material interactions which are highly demanded for the future development of semiconductor device manufacturing.
最长约 10秒,即可获得该文献文件

科研通智能强力驱动
Strongly Powered by AbleSci AI
更新
大幅提高文件上传限制,最高150M (2024-4-1)

科研通是完全免费的文献互助平台,具备全网最快的应助速度,最高的求助完成率。 对每一个文献求助,科研通都将尽心尽力,给求助人一个满意的交代。
实时播报
54秒前
莫冰雪完成签到 ,获得积分10
59秒前
科研通AI2S应助zhang采纳,获得10
1分钟前
1分钟前
小巫发布了新的文献求助10
1分钟前
1分钟前
1分钟前
eccentric发布了新的文献求助10
2分钟前
2分钟前
eccentric完成签到,获得积分10
2分钟前
zhangxr发布了新的文献求助10
2分钟前
科研通AI2S应助科研通管家采纳,获得10
3分钟前
Sandy完成签到 ,获得积分10
3分钟前
兴尽晚回舟完成签到,获得积分10
3分钟前
3分钟前
3分钟前
3分钟前
3分钟前
4分钟前
4分钟前
啊强完成签到 ,获得积分10
4分钟前
无限毛豆发布了新的文献求助10
4分钟前
xiaolang2004完成签到,获得积分10
5分钟前
上官若男应助无限毛豆采纳,获得10
5分钟前
莉莉安完成签到 ,获得积分10
5分钟前
5分钟前
knoren发布了新的文献求助10
5分钟前
DeaR完成签到 ,获得积分10
5分钟前
knoren完成签到,获得积分10
5分钟前
6分钟前
止戈发布了新的文献求助10
6分钟前
7分钟前
小巫发布了新的文献求助10
7分钟前
科研菜狗完成签到 ,获得积分10
7分钟前
小马甲应助lbjcp3采纳,获得10
7分钟前
小巫完成签到,获得积分10
7分钟前
8分钟前
lbjcp3发布了新的文献求助10
8分钟前
脑洞疼应助zhangxr采纳,获得10
8分钟前
丘比特应助科研通管家采纳,获得10
9分钟前
高分求助中
The Oxford Handbook of Social Cognition (Second Edition, 2024) 1050
Kinetics of the Esterification Between 2-[(4-hydroxybutoxy)carbonyl] Benzoic Acid with 1,4-Butanediol: Tetrabutyl Orthotitanate as Catalyst 1000
The Young builders of New china : the visit of the delegation of the WFDY to the Chinese People's Republic 1000
Rechtsphilosophie 1000
Handbook of Qualitative Cross-Cultural Research Methods 600
Chen Hansheng: China’s Last Romantic Revolutionary 500
Mantiden: Faszinierende Lauerjäger Faszinierende Lauerjäger 500
热门求助领域 (近24小时)
化学 医学 生物 材料科学 工程类 有机化学 生物化学 物理 内科学 纳米技术 计算机科学 化学工程 复合材料 基因 遗传学 催化作用 物理化学 免疫学 量子力学 细胞生物学
热门帖子
关注 科研通微信公众号,转发送积分 3139548
求助须知:如何正确求助?哪些是违规求助? 2790430
关于积分的说明 7795269
捐赠科研通 2446905
什么是DOI,文献DOI怎么找? 1301487
科研通“疑难数据库(出版商)”最低求助积分说明 626238
版权声明 601146