A Method to Simulate Extrinsic Light Excitation of Vanadium-Compensated 6H-SiC

Extrinsic light excitation has much lower absorption coefficient compared to intrinsic light excitation, which can better utilize the “bulk” of semiconductor rather than a thin surface as the depth of light absorption is much larger, making it suitable for higher power applications. However, commercial technology computer aided design (TCAD) software has not developed a model for extrinsic light excitation. Therefore, we construct a model of Vanadium-compensated semi-insulating (VCSI) 6H-SiC photoconductive semiconductor switch (PCSS) illuminated with sub-bandgap light, and realize the process of light absorption at V deep acceptor level in Silvaco TCAD simulation by modifying the electron emission rate. Then, we simulate the transient response of 6H-SiC triggered by a nanosecond light pulse and discuss the feasibility of this method.