Fracture toughness and critical thickness of β-(InxGa1−x)2O3/Ga2O3 by first principles

The critical thickness of monoclinic (In x Ga 1− x ) 2 O 3 epitaxial film with In concentration up to 37.5% on β-Ga 2 O 3 substrate along [100], [010] and [001] orientations was explored.