材料科学
光电子学
薄膜
压电
信号(编程语言)
压电传感器
传感器
电压
偏转(物理)
光学
电气工程
纳米技术
复合材料
工程类
计算机科学
物理
程序设计语言
作者
Katja Meinel,Chris Stoeckel,Marcel Melzer,Sven Zimmermann,Roman Forke,Karla Hiller,Thomas Otto
出处
期刊:IEEE Sensors Journal
[Institute of Electrical and Electronics Engineers]
日期:2021-04-15
卷期号:21 (8): 9682-9689
被引量:25
标识
DOI:10.1109/jsen.2020.2997873
摘要
A micromirror with piezoelectric thin film aluminum nitride (AIN) as transducer material for actuation and detection is presented. Four sensor elements are integrated for closed-loop monitoring of the resonant driven microscanner with an entire footprint of 6 mm 2 . The sensor and actuator elements are monolithically fabricated in 150 mm SOI technology. The micromirror is characterized in terms of its scanning and sensor characteristics. A large optical scan angle of 137.9° (34.5° mechanical tilt angle corresponding) at 3385 Hz and 20 V actuation voltage is achieved. The median resonant voltage sensitivity is 4.7 °/V. For the sensor characterization, a cross-talk compensation is introduced, which significantly improves the signal quality and thus enables an accurate charge determination. The sensor signal increases linearly to the deflection. A dynamic sensor angle sensitivity of 48.4 fC/° is reached. Possible applications of the micromirror are consumer electronics, such as LIDAR or medical applications, such as fluorescence microscopy.
科研通智能强力驱动
Strongly Powered by AbleSci AI