Research on Temperature Compensation of Piezo-resistive Pressure Sensor Based on Newton interpolation and Spline interpolation

The actual output of piezo-resistive pressure sensor has temperature drift because the silicon material and packaging medium of piezoresistive pressure sensor are easily affected by the ambient temperature. The compensation of the temperature drift is a great significance to improve the measurement accuracy of the sensor. A compensation method based on newton interpolation and cubic spline interpolation has been proposed in this research, which can be reduced the temperature drift and realized online compensation on the premise of ensuring the computation accurately. The results show that this method is superior to the least square (LS) fitting polynomial method, back propagation (BP) neural network, radial basis function (RBF) neural network and look-up table method in the temperature compensation range of −20°C ~ 80°C. The maximum reference error and average reference error of the compensation results were found the smallest value in this research, which could meet the requirement of high-precision measurement; however, the measurement accuracy of the pressure sensor is effectively improved.