A design of high NA reflective objective for DUV micro-spectroscopy
光谱学
材料科学
光学
光电子学
沉浸式（数学）
物理
数学
量子力学
纯数学
作者
Hikaru Takehara,Keiji Sasaki,Atsushi Taguchi
标识
DOI：10.1364/cleopr.2022.ctha17d_01
摘要
Reflective objective is widely used for DUV micro-spectroscopy, however, the NA of reflective objective is limited typically up to 0.6. We designed DUV reflective objective with NA as high as 1.30 using glycerin as immersion.
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