Electrochemical lift-off of GaN films for GaN-on-GaN technology

Abstract Lifting off the native GaN substrate is an essential step in the fabrication of high-performance devices. In this study, we report a method to separate GaN thin films from GaN substrate through electrochemical (EC) lateral etching. By employing tetramethylammonium hydroxide to treat the dry-etched sidewalls, we addressed the issue of non-uniformity at the EC etching front. Meantime, we investigated the effect of Si doping concentration on the roughness of the lift-off GaN films. It is found that as increasing the doping concentration, the roughness decreases together with a reduced applied bias. Finally, we achieved an epitaxial-level smooth surface with a small roughness of only 0.3 nm.