Development of circuit solution and design of capacitive pressure sensor array for applied robotics

电容感应 电容 压力传感器 信号(编程语言) 传感器阵列 传感器 声学 电压 压阻效应 灵敏度(控制系统) 材料科学 压力测量 数组数据结构 电子工程 计算机科学 电气工程 工程类 光电子学 电极 机械工程 物理 量子力学 机器学习 程序设计语言
作者
Konstantin Krestovnikov,Aleksei Erashov,Аleksandr Bykov
出处
期刊:Robototehnika i tehničeskaâ kibernetika [Russian State Scientific Center for Robotics and Technical Cybernetics]
卷期号:8 (4): 296-307 被引量:4
标识
DOI:10.31776/rtcj.8406
摘要

This paper presents development of pressure sensor array with capacitance-type unit sensors, with scalable number of cells. Different assemblies of unit pressure sensors and their arrays were considered, their characteristics and fabrication methods were investigated. The structure of primary pressure transducer (PPT) array was presented; its operating principle of array was illustrated, calculated reference ratios were derived. The interface circuit, allowing to transform the changes in the primary transducer capacitance into voltage level variations, was proposed. A prototype sensor was implemented; the dependency of output signal power from the applied force was empirically obtained. In the range under 30 N it exhibited a linear pattern. The sensitivity of the array cells to the applied pressure is in the range 134.56..160.35. The measured drift of the output signals from the array cells after 10,000 loading cycles was 1.39%. For developed prototype of the pressure sensor array, based on the experimental data, the average signal-to-noise ratio over the cells was calculated, and equaled 63.47 dB. The proposed prototype was fabricated of easily available materials. It is relatively inexpensive and requires no fine-tuning of each individual cell. Capacitance-type operation type, compared to piezoresistive one, ensures greater stability of the output signal. The scalability and adjustability of cell parameters are achieved with layered sensor structure. The pressure sensor array, presented in this paper, can be utilized in various robotic systems.

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