Aberrations of soft x-ray and vacuum ultraviolet optical systems with orthogonal arrangement of elements

The wave aberration of plane-symmetric optical systems is expressed with the aperture-ray coordinates on the reference exit wavefront in the paper; the defocus aberration caused by the meridional field of source is analyzed in detail. Based on the expressions of the wave aberration and the defocus, the aberrations of the soft x-ray and ultraviolet (XUV) optical systems with an orthogonal arrangement of elements are studied as a whole. The resultant aberration expressions are used to calculate the aberrations of two design examples; the images are compared to the ray-tracing results with Shadow to validate the aberration expressions. The study shows that the accuracy of the aberration expressions is satisfactory. The analytical analysis of aberrations is helpful in the design and optimization of the XUV optical systems with an orthogonal arrangement of elements.