Electrochemical Properties of Boron-Doped Diamond Thin Film Synthesized by MPCVD on Titanium Substrate to Use as an Ozone Generator

Boron-doped diamond (BDD) has been attracting special attentions as a suitable electrode material for water disinfection due to its high chemical and electrochemical stability. In this paper, we had succeeded to generate ozone by using the BDD electrode with high efficiency and more safely compared to traditional lead oxide (PbO2) electrode. The BDD film was deposited on the Ti substrate by microwave plasma chemical vapor deposition to use as an anode for ozone kit. The morphology of samples were observed by Scanning Electron Microscopy (SEM) and the structural-chemical properties of synthesized diamond layer was investigated by Raman Spectroscopy. Conductivity, carrier concentration and Hall mobility was determined by a Hall-effect measurement unit, based on the van der Pauw method. The Ozone concentration in water, which was measured by Ozone Colorimeter.