计算光刻
平版印刷术
光刻
材料科学
下一代光刻
光刻胶
X射线光刻
抵抗
光电子学
作者
Audrius Petrusis,J.H. Rector,Kristen Smith,Sven de Man,Davide Iannuzzi
出处
期刊:20th International Conference on Optical Fibre Sensors
日期:2009-10-05
卷期号:7503: 967-970
摘要
At the beginning of 2009, our group has introduced a new technique that allows fabrication of
photolithographic patterns on the cleaved end of an optical fibre: the align-and-shine
photolithography technique (see A. Petrusis et al., align-and-shine technique for series
production of photolithography patterns on optical fibres, J. Micromech. Microeng. 19, 047001,
2009). Align-and-shine photolithography combines standard optical lithography with imagebased
active fibre alignment processes. The technique adapts well to series production, opening
the way to batch fabrication of fibre-top devices (D. Iannuzzi et al., Monolithic fibre-top
cantilever for critical environments and standard applications, Appl. Phys. Lett. 88, 053501,
2006) and all other devices that rely on suitable machining of engineered parts on the tip of a
fibre. In this paper we review our results and briefly discuss its potential applications.
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