高功率脉冲磁控溅射
物理气相沉积
腔磁控管
摩擦学
薄膜
冶金
微观结构
基质(水族馆)
扫描电子显微镜
X射线光电子能谱
压痕硬度
纳米压痕
表面粗糙度
作者
T. Vitu,T. Huminiuc,Gary L. Doll,Etienne Bousser,Allan Matthews,Tomas Polcar
出处
期刊:Wear
[Elsevier]
日期:2021-09-15
卷期号:: 203939-
被引量:1
标识
DOI:10.1016/j.wear.2021.203939
摘要
Abstract Transition metal dichalcogenides such as MoS2 are widely used as solid lubricants for vacuum applications. On the other hand, diamond-like carbon coatings exhibit excellent sliding properties in the ambient environment. Our Mo-S-C coatings deposited by pulsed d.c. sputtering combine both structures to obtain stable properties regardless of the testing conditions. The coatings were studied using HR-TEM and Raman spectroscopy, revealing amorphous nature of the coating. The tribological properties were evaluated by pin-on-disc method. The results showed high lubrication ability in all the testing conditions. HR-TEM and Raman spectroscopy were employed to show the structural characteristics of the wear traces. Our results indicate that the low-friction effect should be attributed to carbon structure re-arrangement since expected wear-induced MoS2 formation was not observed.
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