Microwave resonator array with liquid metal selection for narrow band material sensing

Abstract A microwave resonator array is integrated with liquid metal to select an individual resonator response within a resonator array, enabling simple and accurate analysis for dielectric sensing. Galinstan, a liquid metal, acts as a multiplexer by inducing a capacitive load to the nearby resonator, lowering its resonant frequency, and thereby isolating its resonant response from other resonators in the array. The liquid metal could be positioned within a fluidic channel to be above any of the resonators, which tuned the resonant frequency from 3.9 to 3.3 GHz where it can be analyzed individually. The resonators showed a consistent response to liquid metal tuning, with tuning error measured below 30 MHz (5%). The sensor also exhibited stable sensitivity to test materials placed on the selected resonator, with a maximum resonant frequency shift of 300 MHz for a dielectric test material (ε = 10.2) and almost no variation in resonant amplitude. The selected resonant response was only sensitive to materials on the selected resonator, and was unaffected by test materials, even when placed on other resonators. The presented design enabled robust and accurate detection of materials using planar microwave resonators that can be controlled at a user’s convenience, specifically for use in systems where multiple parameters or system settings may need to be individually determined.