压电
材料科学
相控阵
传感器
相控阵超声
超声波传感器
PMUT公司
成像体模
声学
陶瓷
光学
电气工程
工程类
天线(收音机)
复合材料
物理
作者
Xiaowen Ma,Yingchun Liu,Jiaji Ruan,Chenyang Tao,Jianren Yuan,Yunfei Chang,Wenwu Cao
出处
期刊:IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control
[Institute of Electrical and Electronics Engineers]
日期:2022-02-01
卷期号:69 (2): 751-760
被引量:7
标识
DOI:10.1109/tuffc.2021.3121086
摘要
Substantial advancement has been made in recent years on lead-free piezoelectric materials, but up to date, it is still a challenge to make a true medical imaging ultrasonic array transducer with center frequency <3 MHz. There are two major obstacles: the difficulty of fabricating large enough uniform lead-free piezoelectric materials with high piezoelectric coefficient, and the severe electrical impedance mismatch of an array element to the imaging system due to the relatively low dielectric constant of lead-free materials compared to lead-based piezoelectric materials. We resolved these two issues by employing texture engineering and stacking piezoelectric-layer design, which allowed us to fabricate an 80 element phased array transducer with the center frequency of 2.9 MHz and a bandwidth >80% for human heart imaging. The high-quality lead-free (Ba0.95Ca0.05)(Ti0.94Zr0.06)O3 textured ceramic plate has the size of 23×22×0.8 mm3 with the piezoelectric constant d33 = 570 pC/N. Phantom imaging and internal clinical human heart imaging demonstrated that this lead-free phased array can produce comparable imaging quality to that of a commercial PZT-5H ceramic-based phased array transducer, which demonstrated the practicality of using lead-free materials to replace PZT ceramics in phased array transducers for medical imaging applications.
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