灵敏度(控制系统)
扫描离子电导显微镜
扫描探针显微镜
化学
分辨率(逻辑)
可靠性(半导体)
扫描热显微术
样品(材料)
聚二甲基硅氧烷
显微镜
纳米尺度
纳米技术
材料科学
电子工程
光学
扫描共焦电子显微镜
计算机科学
人工智能
物理
功率(物理)
色谱法
量子力学
工程类
有机化学
作者
Yangbohan Jiao,Jian Zhuang,Tao Zhang,Langchong He
标识
DOI:10.1021/acs.analchem.1c01918
摘要
Scanning ion conductance microscopy (SICM) is a type of in situ measurement technology for noncontact detection of samples in electrolytes with nanoscale resolution and has been used increasingly in biomedical and electrochemical fields in recent years. However, there is an inherent contradiction in the technique that makes SICM’s sensitivity and accuracy difficult to balance. Higher sensitivity allows for faster probe speeds and higher scanning reliability but leads to lower accuracy, and vice versa. To resolve this problem, an adaptive sensitivity scanning method is proposed here that is designed to increase SICM’s imaging efficiency without reducing its scanning reliability and accuracy. In the proposed scanning method, the sensitivity is automatically switched via the bias voltage based on the probe–sample distance. When the probe is located far away from the sample, the probe then predetects the sample position rapidly with high sensitivity. When the sample has been sensed in the high-sensitivity phase, the probe then detects the sample with low sensitivity. The basic theory and the feasibility of the alterable sensitivity detection strategy is also studied using the finite element method (FEM) and by performing experiments in this work. Finally, through testing of the standard silicon and polydimethylsiloxane (PDMS) samples, the proposed method is shown to increase SICM imaging efficiency significantly by up to 5 times relative to the conventional hopping mode without sacrificing the scanning accuracy and reliability.
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