Fabrication of InGaAs/InP Geiger-mode Avalanche Focal Plane Arrays

The 8×8Geiger-mode avalanche photodiode focal plane arrays(GM APD FPA)which incorporated InGaAs/InP avalanche photodiodes and timing CMOS read-out integrated circuits were designed and manufactured.The avalanche photodiodes have a separate absorption,grading,charge and multiplication region structure(SAGCM)with single photon sensitivity in Geiger-mode.The timing CMOS read-out integrated circuits perform avalanche quenching and time-of-flight measurements for each pixel with a temporal resolution of nanosecond.The hybridintegrated GM APD FPA achieves an average dark count rate of 32.5kHz,and average single photon detection efficiency of 19.5%,while the timing jitter for single pixel is 465 ps.The detection of temporal information of pulse laser is successfully demonstrated.The feasibility of Geiger-mode avalanche photodiode focal plane arrays and their applications in 3Dimaging have been validated.