Influence of cooling rate on microstructure and defect evolution in GaAs during solidification

材料科学 微电子 Crystal(编程语言) 共晶体系 微观结构 结晶学 光电子学 冶金 计算机科学 化学 程序设计语言
作者
Siyuan Wang,Qian Chen,Yongkai Yuan,Tinghong Gao,Yongchao Liang,Zean Tian,Anqi Yang
出处
期刊:Modelling and Simulation in Materials Science and Engineering [IOP Publishing]
卷期号:31 (8): 085018-085018 被引量:1
标识
DOI:10.1088/1361-651x/ad041b
摘要

Abstract The fabrication of high-quality GaAs crystals is essential to approach optimal performance in optoelectronic and microelectronic devices. In this study, a molecular dynamics simulation study was conducted for the solidification of liquid GaAs at three cooling rates (10 10 K s −1 , 10 11 K s −1 , and 10 12 K s −1 ) at 300 K. The structural evolution in terms of crystal structure and defect formation in GaAs was thoroughly investigated using pair distribution function, average atomic energy, the largest standard cluster analysis, and visualization techniques. The results showed that the cooling rate of 10 10 K s −1 led to the development of the best crystal quality with ease of eutectic twin grain boundary coherent twin boundary formation. Increasing the cooling rates to 10 11 K s −1 and 10 12 K s −1 resulted in the amorphous structure. Both high and low cooling rates profoundly affected the formation of As 8 structure, but a maximum amount of 2.2% of As 8 crystal structure was formed at a cooling rate of 10 11 K s −1 . The reduction in cooling rate to 10 10 K s −1 induced the formation of numerous Schottky and Frenkel types of partial dislocations in the GaAs system. Results of this study can serve as potential guidelines to the theory of crystal growth and may be implemented in the fabrication of high-quality GaAs crystals for optimal device performance.

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