Numerical simulation and experimental diagnostics of fast electron kinetics and plasma parameters in a microhollow cathode discharges in helium

Abstract The paper presents the results of studies of plasma parameters and kinetics of fast electrons in the region of negative glow of a discharge with a microhollow cathode at high pressures based on a hybrid model that includes a kinetic description of electrons and a fluid description of the heavy plasma component. The results of numerical calculations are compared with the results of probe studies. It is shown that the hybrid model makes it possible to accurately describe the formation of electron energy distribution function peaks from fast electrons produced as a result of Penning ionization reactions and superelastic collisions. The results of numerical calculations make it possible to predict the parameters of the negative glow plasma in discharges with a microhollow cathode in pure helium and in helium with impurities of various gases, including organic ones.