Controlling the morphology of polycrystalline diamond films via seed density: Influence on grain size and film texture

钻石 化学气相沉积 材料科学 微晶 纹理(宇宙学) 金刚石材料性能 拉曼光谱 沉积(地质) 化学工程 碳膜 纳米技术 薄膜 复合材料 光电子学 光学 冶金 地质学 工程类 古生物学 人工智能 物理 图像(数学) 计算机科学 沉积物
作者
David Vázquez-Cortés,Stoffel D. Janssens,Eliot Fried
出处
期刊:Carbon [Elsevier BV]
卷期号:228: 119298-119298 被引量:4
标识
DOI:10.1016/j.carbon.2024.119298
摘要

Controlling the morphology of polycrystalline diamond (PCD) films is crucial for various applications, including thermal management and quantum sensors. PCD films are typically produced by plasma-enhanced chemical vapor deposition on substrates seeded with nanodiamonds. Different film morphologies can be achieved by controlling growth rates of crystal-forming facets, which is commonly achieved through deposition temperature and hydrocarbon concentration in the plasma. However, the impact of seed density on film morphology remains largely unexplored. In this study, we observed that reducing seed density on silicon substrates has a similar effect on PCD film morphology as increasing hydrocarbon concentration in the plasma. Specifically, as seed density decreases, deposition rate increases, and film texture transitions from (1 1 1) to (1 0 0), followed by the formation of large grains with (1 0 0) facets surrounded by clusters of small grains. These changes were observed using electron microscopy, Raman spectroscopy, and X-ray diffraction. To explain our results, we hypothesize that the silicon–plasma interface surrounding the growing diamond seeds acts as a diamond precursor source. Our proposed explanation requires relatively long precursor migration lengths compared to those assumed in standard diamond deposition theory. Finally, we also propose two new mechanisms for diamond precursor adsorption based on well-established physical phenomena and recent publications. Our findings may open new avenues in diamond research, applicable not only to polycrystalline but also to single-crystal diamond deposition.
最长约 10秒,即可获得该文献文件

科研通智能强力驱动
Strongly Powered by AbleSci AI
更新
PDF的下载单位、IP信息已删除 (2025-6-4)

科研通是完全免费的文献互助平台,具备全网最快的应助速度,最高的求助完成率。 对每一个文献求助,科研通都将尽心尽力,给求助人一个满意的交代。
实时播报
朱成豪发布了新的文献求助10
1秒前
deallyxyz应助科研通管家采纳,获得10
1秒前
科目三应助科研通管家采纳,获得10
1秒前
大个应助科研通管家采纳,获得10
1秒前
比比谁的速度快应助曾珍采纳,获得50
1秒前
1秒前
予修应助科研通管家采纳,获得10
1秒前
搜集达人应助科研通管家采纳,获得10
1秒前
wanci应助科研通管家采纳,获得30
1秒前
1秒前
1秒前
吹雪完成签到,获得积分0
1秒前
美好的尔白完成签到,获得积分10
1秒前
O-M175完成签到,获得积分10
2秒前
Jasper应助hahaha123213123采纳,获得10
2秒前
可爱的函函应助天天向上采纳,获得10
3秒前
陈隆完成签到,获得积分10
7秒前
7秒前
高乾飞完成签到 ,获得积分10
8秒前
河大青椒完成签到,获得积分10
8秒前
丘比特应助动听的秋白采纳,获得10
9秒前
晒黑的雪碧完成签到,获得积分10
10秒前
yao chen完成签到,获得积分10
11秒前
catch完成签到,获得积分10
11秒前
Hrx完成签到,获得积分10
11秒前
哎呀哎呀25完成签到,获得积分10
12秒前
15秒前
Shark完成签到 ,获得积分10
15秒前
我要发财完成签到,获得积分10
16秒前
卡卡罗特完成签到,获得积分10
16秒前
16秒前
天天向上完成签到 ,获得积分10
17秒前
Xinxxx完成签到,获得积分10
17秒前
Echoheart完成签到,获得积分10
17秒前
Hrx发布了新的文献求助10
18秒前
我要发财发布了新的文献求助10
20秒前
WJing发布了新的文献求助10
21秒前
haonanchen完成签到,获得积分10
22秒前
彭于晏应助专注的白柏采纳,获得10
22秒前
99v587完成签到,获得积分10
23秒前
高分求助中
【提示信息,请勿应助】关于scihub 10000
Les Mantodea de Guyane: Insecta, Polyneoptera [The Mantids of French Guiana] 3000
徐淮辽南地区新元古代叠层石及生物地层 3000
The Mother of All Tableaux: Order, Equivalence, and Geometry in the Large-scale Structure of Optimality Theory 3000
Handbook of Industrial Diamonds.Vol2 1100
Global Eyelash Assessment scale (GEA) 1000
Picture Books with Same-sex Parented Families: Unintentional Censorship 550
热门求助领域 (近24小时)
化学 材料科学 医学 生物 工程类 有机化学 生物化学 物理 内科学 纳米技术 计算机科学 化学工程 复合材料 遗传学 基因 物理化学 催化作用 冶金 细胞生物学 免疫学
热门帖子
关注 科研通微信公众号,转发送积分 4038368
求助须知:如何正确求助?哪些是违规求助? 3576068
关于积分的说明 11374313
捐赠科研通 3305780
什么是DOI,文献DOI怎么找? 1819322
邀请新用户注册赠送积分活动 892672
科研通“疑难数据库(出版商)”最低求助积分说明 815029