Controlling the morphology of polycrystalline diamond films via seed density: Influence on grain size and film texture

钻石 化学气相沉积 材料科学 微晶 纹理(宇宙学) 金刚石材料性能 拉曼光谱 沉积(地质) 化学工程 碳膜 纳米技术 薄膜 复合材料 光电子学 光学 冶金 地质学 古生物学 图像(数学) 人工智能 计算机科学 物理 工程类 沉积物
作者
David Vázquez-Cortés,Stoffel D. Janssens,Eliot Fried
出处
期刊:Carbon [Elsevier BV]
卷期号:228: 119298-119298 被引量:4
标识
DOI:10.1016/j.carbon.2024.119298
摘要

Controlling the morphology of polycrystalline diamond (PCD) films is crucial for various applications, including thermal management and quantum sensors. PCD films are typically produced by plasma-enhanced chemical vapor deposition on substrates seeded with nanodiamonds. Different film morphologies can be achieved by controlling growth rates of crystal-forming facets, which is commonly achieved through deposition temperature and hydrocarbon concentration in the plasma. However, the impact of seed density on film morphology remains largely unexplored. In this study, we observed that reducing seed density on silicon substrates has a similar effect on PCD film morphology as increasing hydrocarbon concentration in the plasma. Specifically, as seed density decreases, deposition rate increases, and film texture transitions from (1 1 1) to (1 0 0), followed by the formation of large grains with (1 0 0) facets surrounded by clusters of small grains. These changes were observed using electron microscopy, Raman spectroscopy, and X-ray diffraction. To explain our results, we hypothesize that the silicon–plasma interface surrounding the growing diamond seeds acts as a diamond precursor source. Our proposed explanation requires relatively long precursor migration lengths compared to those assumed in standard diamond deposition theory. Finally, we also propose two new mechanisms for diamond precursor adsorption based on well-established physical phenomena and recent publications. Our findings may open new avenues in diamond research, applicable not only to polycrystalline but also to single-crystal diamond deposition.
最长约 10秒,即可获得该文献文件

科研通智能强力驱动
Strongly Powered by AbleSci AI
更新
PDF的下载单位、IP信息已删除 (2025-6-4)

科研通是完全免费的文献互助平台,具备全网最快的应助速度,最高的求助完成率。 对每一个文献求助,科研通都将尽心尽力,给求助人一个满意的交代。
实时播报
刚刚
1秒前
越啊发布了新的文献求助10
2秒前
研友_LX66qZ发布了新的文献求助10
2秒前
研友_ZzrWKZ完成签到 ,获得积分10
3秒前
如意闭月完成签到,获得积分10
9秒前
心静听炊烟完成签到 ,获得积分10
13秒前
yin景景给yin景景的求助进行了留言
15秒前
18秒前
小魏哥完成签到,获得积分10
22秒前
24秒前
24秒前
25秒前
27秒前
31秒前
zhou默完成签到,获得积分10
31秒前
英姑应助clcl采纳,获得10
34秒前
研友_LX66qZ完成签到,获得积分10
34秒前
ran发布了新的文献求助10
37秒前
搜集达人应助大罗采纳,获得10
37秒前
量子星尘发布了新的文献求助10
38秒前
CipherSage应助Dai采纳,获得30
39秒前
科研通AI5应助王佳亮采纳,获得10
41秒前
42秒前
45秒前
英姑应助Sea_U采纳,获得10
46秒前
金金金完成签到,获得积分10
47秒前
cobo完成签到,获得积分10
48秒前
肖肖发布了新的文献求助10
49秒前
Rondab应助准炮打不准采纳,获得10
50秒前
ran完成签到,获得积分10
50秒前
遇上就这样吧应助YSJ采纳,获得10
51秒前
51秒前
朱1591完成签到,获得积分10
53秒前
研友_VZG7GZ应助战斗暴龙兽采纳,获得10
55秒前
55秒前
55秒前
58秒前
YJ888发布了新的文献求助10
58秒前
c_123发布了新的文献求助10
59秒前
高分求助中
A new approach to the extrapolation of accelerated life test data 1000
ACSM’s Guidelines for Exercise Testing and Prescription, 12th edition 500
‘Unruly’ Children: Historical Fieldnotes and Learning Morality in a Taiwan Village (New Departures in Anthropology) 400
Indomethacinのヒトにおける経皮吸収 400
Phylogenetic study of the order Polydesmida (Myriapoda: Diplopoda) 370
基于可调谐半导体激光吸收光谱技术泄漏气体检测系统的研究 350
Robot-supported joining of reinforcement textiles with one-sided sewing heads 320
热门求助领域 (近24小时)
化学 材料科学 医学 生物 工程类 有机化学 生物化学 物理 内科学 纳米技术 计算机科学 化学工程 复合材料 遗传学 基因 物理化学 催化作用 冶金 细胞生物学 免疫学
热门帖子
关注 科研通微信公众号,转发送积分 3989069
求助须知:如何正确求助?哪些是违规求助? 3531351
关于积分的说明 11253589
捐赠科研通 3269939
什么是DOI,文献DOI怎么找? 1804851
邀请新用户注册赠送积分活动 882074
科研通“疑难数据库(出版商)”最低求助积分说明 809073