Comprehensive compensation of dynamic hysteresis and creep for piezoelectric actuator

Abstract This paper addresses the modeling of dynamic hysteresis and creep in piezoelectric actuators, and employs feedforward open-loop control based on inverse models to compensate for hysteresis and creep phenomena. The comprehensive model consists of quasi-dynamic and dynamic components. The quasi-dynamic model combines the quasi-dynamic Prandtl–Ishlinskii (PI) model with an PI-based linear time-invariant model, while the dynamic part utilizes the auto-regressive exogenous model. The model accurately describes creep and dynamic hysteresis with modeling errors of less than 0.01 μ m and 0.14 μ m, respectively. The inversion of the comprehensive model has been proven to exhibit unique convergence. Under inverse feedforward control, the improvement in dynamic hysteresis and hysteresis with creep can be achieved at 94% and 83%, respectively. The comprehensive model proposed in this paper accurately describes the dynamic hysteresis and creep phenomena in piezoelectric actuators and realizes open-loop compensation control, achieving precise actuation of piezoelectric actuators.