P‐13: Large Subthreshold Swing of LTPS TFTs by Efficient Annealing Method for Light Emitting Diode Displays

In the OLED backplane process, we have succeeded in controlling the TFT characteristics by optimizing the condition of hydrogenation annealing. This resulted in the good gray level control of the OLED display. We have finally developed the OLED smartphone display using this technology.