纳米光刻
纳米技术
数码产品
光刻
可扩展性
材料科学
纳米结构
平版印刷术
计算机科学
制作
工程类
光电子学
电气工程
病理
数据库
医学
替代医学
作者
Abel Santos,M. Jamal Deen,Lluı́s F. Marsal
出处
期刊:Nanotechnology
[IOP Publishing]
日期:2015-01-08
卷期号:26 (4): 042001-042001
被引量:71
标识
DOI:10.1088/0957-4484/26/4/042001
摘要
In the last decade, some low-cost nanofabrication technologies used in several disciplines of nanotechnology have demonstrated promising results in terms of versatility and scalability for producing innovative nanostructures. While conventional nanofabrication technologies such as photolithography are and will be an important part of nanofabrication, some low-cost nanofabrication technologies have demonstrated outstanding capabilities for large-scale production, providing high throughputs with acceptable resolution and broad versatility. Some of these nanotechnological approaches are reviewed in this article, providing information about the fundamentals, limitations and potential future developments towards nanofabrication processes capable of producing a broad range of nanostructures. Furthermore, in many cases, these low-cost nanofabrication approaches can be combined with traditional nanofabrication technologies. This combination is considered a promising way of generating innovative nanostructures suitable for a broad range of applications such as in opto-electronics, nano-electronics, photonics, sensing, biotechnology or medicine.
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