Laser-Sculptured Hierarchical Spinous Structures for Ultra-High-Sensitivity Iontronic Sensors with a Broad Operation Range

Tactile pressure sensing over a wide operation range (>1 MPa) is challenging for a variety of applications in fields such as aviation, oceanography, and biomedicine. Recently, innovative strategies have been utilized to improve the performances of tactile sensors using specially designed structures, dielectric layers, and electrodes. Here, a hierarchical structural design based on ionic gel films has been utilized to build iontronic pressure sensors with ultrahigh sensitivities and broad operation ranges. Sculptured patterns made by a controlled CO2 laser scanning process have been produced on polyimide films to achieve two kinds of protrusion structures for high specific surface areas and strength to withstand high pressure. The iontronic sensor has been constructed by adding two screen-printed electrodes of high surface areas to achieve an ultrahigh sensitivity of 2593 kPa-1 and a wide pressure range from 0 Pa to 3.36 MPa. The prototype device also has a fast response and recovery time of 26 and 13 ms, respectively, and an excellent mechanical durability in the endurance test of over 2700 repeated loading and unloading cycles under a pressure of 1 MPa. Several application examples have been demonstrated, including the detection of physiological signals on human volunteers, the feedback control of intelligent robots, the grasping operation of underwater soft grippers, and the environmental wind-speed monitoring. As such, this work demonstrates a versatile and economical methodology to produce high-performance flexible sensors for various potential applications.