光学
栅栏
校准
轮廓仪
云纹
混叠
材料科学
空间频率
衍射光栅
显微镜
物理
计算机科学
人工智能
表面光洁度
量子力学
欠采样
复合材料
作者
Lu Wang,Yiping Cao,Chengmeng Li,Yingying Wan,Hongmei Li,Cai Xu,Hechen Zhang
出处
期刊:Applied Optics
[Optica Publishing Group]
日期:2021-01-08
卷期号:60 (5): 1209-1209
被引量:10
摘要
An improved computer-generated moiré profilometry (CGMP) with flat image calibration is proposed. In CGMP, the purification of the AC component plays a decisive role. While a composite grating modulated with both the sinusoidal grating and its background light substitutes for the sinusoidal grating itself, the sinusoidal deformed pattern and flat image can be demodulated from the captured pattern. It is found that the sinusoidal deformed pattern and flat image may deviate, which is caused by ambient light. So flat image calibration is conducted to obtain a purer AC component that can effectively suppress the influence of ambient light and ensure the measurement accuracy, even if spectrum aliasing exists. Experimental results show the feasibility and validity of the proposed method.
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