Tunable seesaw-like 3D capacitive sensor for force and acceleration sensing

Abstract To address the resource-competing issue between high sensitivity and wide working range for a stand-alone sensor, development of capacitive sensors with an adjustable gap between two electrodes has been of growing interest. While several approaches have been developed to fabricate tunable capacitive sensors, it remains challenging to achieve, simultaneously, a broad range of tunable sensitivity and working range in a single device. In this work, a 3D capacitive sensor with a seesaw-like shape is designed and fabricated by the controlled compressive buckling assembly, which leverages the mechanically tunable configuration to achieve high-precision force sensing (resolution ~5.22 nN) and unprecedented adjustment range (by ~33 times) of sensitivity. The mechanical tests under different loading conditions demonstrate the stability and reliability of capacitive sensors. Incorporation of an asymmetric seesaw-like structure design in the capacitive sensor allows the acceleration measurement with a tunable sensitivity. These results suggest simple and low-cost routes to high-performance, tunable 3D capacitive sensors, with diverse potential applications in wearable electronics and biomedical devices.